Zero Drift Positioning Stage

Kurzfassung

A Dutch engineering group developed a positioning stage that is able to position substrates in the nanometre range, with sub-nanometre stability after positioning has taken place. The high position stability is created by excluding all actuator forces on the substrate holder and creating a fixed position with respect to the frame. The company is looking for a technical cooperation with companies or research institutes looking for positioning solutions with high stability.

Details

For accurate positioning where also high stability is required for instance in electron beam or ion beam microscopy the Zero Drift Positioning Stage can be a solution.
The piezo-electric driven stage is capable of moving in a horizontal plane in limited space under vacuum conditions.
It has been designed in such a way that after reaching the desired position the stage will be mechanically locked to the frame for high stability, without affecting the reached position.
It can be equipped with an integrated measuring system in order to monitor the reached position.
The concept can be tailored to specific demands.

Innovative Aspects:
High stability in sub-nanometre range in short term after positioning has taken place.

The system will dissipate no power after positioning and is well suited for vacuum as well as cryogenic applications.
This stage has the following advantages:
- Nanometre resolution
- Stroke: several millimetres
- Stability: sub-nanometre
- Vacuum-compatible
- Cryogenic-compatible