Seeking vacuum pumps for physical deposition and plasma tools

Kurzfassung

A Turkish technology oriented SME, designs and manufactures vacuum coating and thin film deposition systems as well as vacuum components. The company seeks potential vacuum pump suppliers to sign commercial agreement with technical assistance.

Details

A Turkish technology based SME, manufactures sputtering and plasma enhanced chemical vapour deposition. The regarded applications are used in assembling thin films that are to be used as alternative reflecting coatings on transparent substrates, low-emission or solar control coatings, conductive coatings such as transparent conducting oxides, used in photovoltaic devices.

In all three applications mentioned above pressure governs a crucial role as all techniques are high vacuum techniques requiring operation of turbo and / or cryo- pumps as well as mechanical pumps. Based on the given reason, the role of vacuum pump is crucial.

Based on the company policy of supplying high quality products, the parts utilized shall also be of high quality. Therefore, the Turkish SME is seeking vacuum pump manufacturers. The company is looking for signing a commercial agreement with technical assistance with vacuum pump manufacturers.

Technical Specifications / Specific technical requirements:
Mechanical Pumps:

A. Oil Sealed:
Dual Stage with ultimate vacuum <5x10-3 mbar
Pumping Speed: 2 – 200 m3/h.
Anti suck-back feature required.
Min 3 years warranty

B. Dry Mechanical Pump
Pumping speed: 2 – 100 m3/h
Ultimate vacuum <1x10-2 mbar
Anti suck-back feature required.
Min 3 years warranty

High Speed Pumps:

A. Cryo-pumps
Pumping speed: 1000 – 150,000 l/s
Ultimate vacuum <1x10-8 mbar
Low maintenance required
Min 3 years warranty

B. Turbo-molecular Pumps
Pumping speed: 100 – 3,000 l/s
Ultimate vacuum <1x10-7 mbar
Low maintenance required
Min 3 years warranty