High precision piezo electric motor for use in magnetic and ultra high vacuum environments

Kurzfassung

At a Dutch University a novel, compact Piezoelectric Motor for use in magnetic and ultra high vacuum environments has been developed. The device is capable of sub-nanometre resolution within a range of several millimetres, while eliminating all undesired movement. The researchers are looking for partners working in UHV/ magnetic / cryogenic environments for technical co-operation for development of a prototype and/or to licence this technology.

Details

Piezomotors are based on the reverse piezoelectric effect which causes tiny deformations in certain materials on application of an electric field. In a piezomotor movement is caused by a culmination of thousands of these tiny deformations. This makes it ideal for applications requiring a high degree of precision as the motor can move in very small increments.

The researchers needed a very precise, stackable, motor for use in their nanomanipulator. It needed to be non-magnetic and UHV compatible as it was to be used inside a SEM (Scanning Electron Microscope). Commercially available piezomotors were found to be inadequate, which led to the design of a new motor.

The result is a multilayered step driven piezomotor which provides sub-nanometre precision over a range of several millimetres. A design aimed at a rigid construction prevents transmission of mechanical forces to the piezo-element and minimises hysteresis. The design also eliminates unwanted lateral or vertical movement during the stepping process. The multilayered step element allows for maximal holding forces with zero energy expenditure while saving space, minimising drive error and increasing control.

Innovative Aspects:
- No side motion of the moving bar
- No lifting of the moving bar during the stepping process
- Direct stack ability
- Very compact design compared to similar motors
- No bending legs but multilayered stack pairs (saves space, higher
stiffness and gives a better motion control)
- New electronic driving signal (implemented from CM-IP)