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Profil TitelWorld-class MEMS and micro-component fabrication facility for prototype development and manufacturing  

Referenz

06 GB NMRT 0GKN
HerkunftslandUnited Kingdom
KooperationsartAngebot
Eintrag/Änderung2006-11-16 / 2008-02-28

Kurzfassung

This UK MEMS fabrication facility can process 150mm substrates. The capabilities include e-beam lithography, High Aspect Ratio Processing, dry metal etching, micro-milling, wafer bonding, silicon on insulator, glass, quartz, and polyimide. The Bio laboratory offers molecular biology, surface functionalisation, molecule and particle preparation, tissue culture and bio-engineering. The facility is looking for industry partners wanting to develop new products or processes.

Details

This facility has recently completed investment in a world-class 150mm MEMS fabrication capability. The investment takes the facility from 100mm to 150mm substrates (wafers), and adds a number of new capabilities for the manufacture of micro components or MEMS devices. The following services are available:

MEMS Fabrication:
- Lithography.
- Deposition Processes.
- Micromachining Processes (high aspect ratio).
- Inspection.
- Characterisation.
- Packaging Processes.

Bio-laboratory:
- Surface functionalisation.
- Imaging.
- Surface chemistry.
- In vitro studies.

Imaging Systems:
- Analytical tools.

Further details of which can be found in the Technical Aspects section below.

The facility is looking for industry partners with whom it can develop new products and processes (or improve existing ones) based on Microsystems.

Innovative Aspects:
Comprehensive 150mm MEMS fabrication capability together with Bio laboratory Industrial Experience and project management of technical development.

The product development projects conducted to date include 3-axis accelerometer, gyroscope, chemical detectors, biosensors, magnetic sensors, micro fluidics and others. The 18 full-time technical staff conducts product & process design & development of customer products. These staffs have been recruited from industry with experience in the commercialisation of miniaturised components.


Technologiesektor

- Hochfrequenztechnologie, Mikrowellentechnologie
- Mikrotechnik
- Mikromaschinenbau
- Nanotechnologien
- Optische Netze und Systeme
- Halbleiter
- Sensor/Multisensortechnik, Instrumentierung
- Elektrotechnik und Elektrogeräte
- Biosensoren
- Sensoren/Multisensortechnik, Meßtechnik
- Mikromaschinenbau
- Mikro- und Nanotechnologie

Anwendungsbereich

- Other commercial communications
- Microwave and satellite components
- Customised semiconductors
- Other semiconductors
- Diagnostic test products and equipment
- Other diagnostic
- Exploration equipment instrumentation
- Semiconductor materials (eg silicon wafers)
- III/V semiconductor materials (eg gallium arsenide)

Entwicklungstand

Already on the market  

Patentrechte (IPR)

Others  
 A large resource of high-value IP exists within the facilites`s host organisation. Patents are held across a range of areas including biosensors, MEMS, nanofabrication, & instrumentation. Access to this intellectual capital is available through us.  

Kooperationstyp

- Joint further development
- Testing of new applications
- Adaptation to specific needs
- Joint Venture Agreement
- Transfer of knowledge in new raw materials
- New way to use an existing production line
- Change in the currently used technologies
- Absolutely novel process
- Assembly
- Engineering
- Technical consultancy
- Quality control
- Maintenance
- Financial Resources

# Type of partner sought
The facility is looking for industry partners with whom it can develop new products and processes (or improve existing ones) based on microsystems.
# Specific area of activity of the partner
Any partner interested in devices.
# Task to be performed
Co-development of new products and processes.

Organisationstyp

Technical Centre/Technology transfer Centre      Größe: 11-50  
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