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Profil TitelAutomated 3D calibration technology for scanning microscopes  

Referenz

08 DE NDVD 0JLZ
HerkunftslandGermany
KooperationsartAngebot
Eintrag/Änderung2008-02-03 / 2009-02-18

Kurzfassung

A German SME specialised in measurement technology at the micro- and nano-range as well as in specific software development has driven extensive research activities in the field of three-dimensional calibration technique. The company has developed an automated 3D calibration technology for scanning microscopes. The SME is also an expert in terms of Focused Ion Beam (FIB). They are seeking companies or research institutes for manufacturing agreements or technical co-operation.

Details

A German SME has developed and designed a 3D reference structure in combination with calibration software for automated dimensional calibration of scanning microscopes as well as measurement data correction.
Calibration technology is available for Scanning Probe Microscopes (SPM). It has been field tested for Scanning Electron Microscopes equipped with 4 Backscatter Electron Detector Systems (SEM with 4BSED). Calibration of optical 3D micro-measurement systems is in development.

Innovative Aspects:
Simultaneous lateral and vertical calibration is provided in one measurement step. For the first time, determination of coupling between vertical and lateral axes is possible. Calibration is extremely efficient and accurate due to advanced statistical and image processing routines. Multi-modal application with one reference structure is possible.


Technologiesektor

- Computer Software
- Abbildungstechnologie, Bildverarbeitung, Mustererkennung
- Optik
- Mikro- und Nanotechnologie
- Optische Technologien

Anwendungsbereich

- Analytical and Scientific Instrumentation
- Machine vision software and systems

Entwicklungstand

Available for demonstration  

Patentrechte (IPR)

Secret know-how  

Kooperationstyp

- Joint further development
- Testing of new applications
- Adaptation to specific needs
- Absolutely novel process

# Type of partner sought
Industry, academics, research.
# Specific area of activity of the partner
Partners using scanning microscopes and likely to use calibration software.
# Task to be performed
Integrate and further develop the technology described above together with the offerer.

Organisationstyp

Other      Größe: < 10  
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